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SEMI E30-0418 (technical revision)
and curing characteristics
general contractors
It expands the GEM standard requirements and capabilities in the areas of state models (stocker controller
PV01500 - SEMI PV15 - 太陽電池材料の表面ラフネスおよびテクスチャをモニタするための角度分解光散乱測定条件の定義に関するガイド Revision:SEMI PV15-0211 - Superseded SEMI E30-0418 (technical revision)global Photovoltaics Committee20101221global Audits and Reviews Subcommittee20112www. semiviews. org www. semi. org Referenced SEMI Standards SEMI M59 Terminology for Silicon Technology SEMI ME1392 Guide for Angle Resolved Optical Scatter Measurement on Specular or Diffuse Surfaces SEMI MF1048 Test Method for Measuring Reflective Total Integrated Scatter SEMI MF1811 Guide for Estimating the Power Spectral Density Function and Related Finish Parameters